Apparatus and Method for Low Capacitance Packaging for Direct Conversion X-Ray or Gamma Ray Detector

摘要: A direct-conversion X-ray detector includes one or more modules. The modules can include a substrate, sensor tiles, and photon-counting application specific integrated circuit (ASIC). substrate has dielectric constant of less than about 3.5 is capable lithographic conductor patterning with feature sizes 5 um less. direct conversion tiles have an array electrodes electrically coupled to first surface the substrate. ASICs are disposed laterally along respect tiles. Conductive lines spaced configured couple ASICs.