作者: N.-G. Kim , T. McCulloch , J.-J. Lee , H.-B. Yun
DOI: 10.1007/978-3-319-15212-7_6
关键词:
摘要: … not require external power supply and additional electronic … C through physical vapor deposition (PVD). Thermal residual … We used α-Al 2 O 3 thin film as target material in this study, …