Overlay accuracy on a flexible web with a roll printing process based on a roll-to-roll system.

摘要: For high-quality flexible devices from printing processes based on Roll-to-Roll (R2R) systems, overlay alignment during the patterning of each functional layer poses a major challenge. The reason is because substrates have relatively low stiffness compared with rigid substrates, and they are easily deformed web handling in R2R system. To achieve high accuracy for substrate, it important not only to develop modules (such as guiding, tension control, winding, unwinding) precise tool but also control synchronization unit total A system reverse offset process were developed this work, an between 1st 2nd layers ±5μm 500 mm-wide film was achieved at σ level 2.4 2.8 (x y directions, respectively) continuous process. This paper presents components mechanisms used results including positioning accuracy.