Metal foam shield for sputter reactor

摘要: A shield ( 22 ) for protecting chamber walls 14 of a sputter reactor 10 comprising foam metal shaped into desired shape. The inserts 24 are easily configured mounting within the chamber. material provides more surface area and better adhesion coated particles, thereby reducing particulate emission allowing longer use before replacement. shields also relatively inexpensive to fabricate. Once is with can be removed from heated in thermite reaction, particles collected on an elemental thus facilitating recovery deposited material. apparatus has target 12 ), vacuum pump 21 pedestal 18 substrate 16 gas supply system 20 clips 25 insulating ring 26 DC power layer 28 ).