ION SOURCE DEVICE

摘要: PURPOSE:To obtain a highly-reliable large ion source device with great capacity which can be stably manufactured by using synthetic resin containing filling material to form an insulating body is penetrated lead wires for supplying voltage the electrodes of ion-accelerating part. CONSTITUTION:An 8 made such as or silica glass. It either integrated stuck first positive-electrode-supporting flange 4a and grounding-electrode-supporting 4d. A second part 3b negative-electrode-supporting 3c are fixed vacuum side 8. Cooling- water-introducing parts 5b 5c introduced into through The provided steps fixed. As result, easily worked assembled, possibility leakage reduced reliability increased.