Sol–gel derived (Li, Mg): ZnO films with high c-axis orientation and electrical resistivity
作者： Jun Liu , Wenjian Weng , Weihua Ding , Kui Cheng , Piyi Du
DOI: 10.1016/J.SURFCOAT.2004.10.081
关键词:
摘要: Abstract ZnO films with high orientation and resistivity have a great potential in piezoelectrical devices. In this work, Li- Mg-doped on glass substrates were prepared by sol–gel spin-coating two-step growth. The effects of the dopants heating temperature c -axis resulting investigated. For formed growth, first grown layer played significant role film. results showed that Mg doping into Li:ZnO could improve increase resistivity, optimized (Li,Mg):ZnO film had highly orientation, small grain size 11.18×10 7 Ω·cm.
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Zhai Jiwei, Zhang Liangying, Yao Xi, The dielectric properties and optical propagation loss of c-axis oriented ZnO thin films deposited by sol–gel process Ceramics International. ,vol. 26, pp. 883- 885 ,(2000) , 10.1016/S0272-8842(00)00031-6
Shinobu Fujihara, Chikako Sasaki, Toshio Kimura, Effects of Li and Mg doping on microstructure and properties of sol-gel ZnO thin films Journal of The European Ceramic Society. ,vol. 21, pp. 2109- 2112 ,(2001) , 10.1016/S0955-2219(01)00182-0
Takashi Minemoto, Takayuki Negami, Shiro Nishiwaki, Hideyuki Takakura, Yoshihiro Hamakawa, Preparation of Zn1−xMgxO films by radio frequency magnetron sputtering Thin Solid Films. ,vol. 372, pp. 173- 176 ,(2000) , 10.1016/S0040-6090(00)01009-9
Dinghua Bao, Haoshuang Gu, Anxiang Kuang, Sol-gel-derived c-axis oriented ZnO thin films Thin Solid Films. ,vol. 312, pp. 37- 39 ,(1998) , 10.1016/S0040-6090(97)00302-7
Y Natsume, H Sakata, Zinc oxide films prepared by sol-gel spin-coating Thin Solid Films. ,vol. 372, pp. 30- 36 ,(2000) , 10.1016/S0040-6090(00)01056-7
Jin-Hong Lee, Kyung-Hee Ko, Byung-Ok Park, Electrical and optical properties of ZnO transparent conducting films by the sol-gel method Journal of Crystal Growth. ,vol. 247, pp. 119- 125 ,(2003) , 10.1016/S0022-0248(02)01907-3
Jae Hyoung Choi, Hitoshi Tabata, Tomoji Kawai, Initial preferred growth in zinc oxide thin films on Si and amorphous substrates by a pulsed laser deposition Journal of Crystal Growth. ,vol. 226, pp. 493- 500 ,(2001) , 10.1016/S0022-0248(01)01388-4
Shinobu Fujihara, Chikako Sasaki, Toshio Kimura, Crystallization behavior and origin of c-axis orientation in sol-gel-derived ZnO:Li thin films on glass substrates Applied Surface Science. ,vol. 180, pp. 341- 350 ,(2001) , 10.1016/S0169-4332(01)00367-1