Low-loss superconducting devices
作者： George A. Keefe , David P. Pappas , Michael R. Vissers , Antonio D. Corcoles Gonzalez , Mary E. Rothwell
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摘要: Low-loss superconducting devices and methods for fabricating low loss devices. For example, devices, such as resonator are formed with a (200)-oriented texture titanium nitride (TiN) layer to provide high Q, structures particularly suitable application radio-frequency (RF) and/or microwave resonators, coplanar waveguide resonators. In one aspect, method of forming device includes foaming silicon (SiN) seed on substrate, the SiN layer.
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