Run-to-run controller for use in microelectronic fabrication

摘要: A automated run-to-run controller for controlling manufacturing processes comprises set of processing tools, a metrology tools taking measurements from the and supervising station managing tools. The an interface receiving data number variable parameter tables, one each collectively associated with process recipe. also includes or more internal models which relate received to variables tool, can modify stored in table control using feedback and/or feed-forward algorithms. Feed-forward algorithms may, certain embodiments, be used adjust targets closed loop control. may have user by different model formats (single multi-variate) interactively selected based upon experimental predicted behavior system, permit users utilize their own