Fundamental aspects of SNMS for thin film characterization: experimental studies and computer simulations

摘要: Abstract The idea of secondary neutral mass spectroscopy (SNMS) as a tool for surface analysis dates back to the early 1970s. Recently, due development new and effective post ionization tools, i.e. lasers, this method has become an interesting alternative more conventional methods various applications in analysis, instance depth profiling or characterization thin films. SNMS, general, involves complicated apparatus than other techniques, additional post-ionizing stage. However, last few years it been demonstrated by many groups that several situations SNMS offers substantial advantages compared with methods, particular ion spectrometry. In paper we will evaluate current situation laser-SNMS, related field film research. On behalf experimental studies computer simulations phenomena show possibilities, also problems associated method.