Method and system for a mems detector that enables control of a device using human breath

摘要: Methods and systems for a MEMS detector that enables control of device using human breath are disclosed may include detecting air flow caused by via microelectromechanical (MEMS) detector, which deflectable members operable to detect the movement air. The deflection be limited spacer within detector. amount determined measuring reflected light signals, piezoelectric capacitance changes, or current generated in magnetic field. Output signals based on detected movement. substrate, spacer, members. substrate ceramic material and/or silicon, embedded devices interconnects. An integrated circuit electrically coupled substrate. Air flows directed out side