LIGA process – micromachining technique using synchrotron radiation lithography – and some industrial applications
作者： Yoshihiro Hirata
DOI: 10.1016/S0168-583X(03)00632-3
关键词:
摘要: We developed the LIGA (Lithographie or lithography/Galvanoformung electroforming/Abformung molding) process using a compact synchrotron radiation (SR) source. To make SR source applicable for process, we highly sensitive resist and transparent mask deep lithography. commercialized two devices, piezoelectric composite microprobe IC testing. A microconnector optical switch were also developed.
harvard.edu
elsevier.com
sci-hub.se 参考文章(7)
T. Numazawa, Y. Hirata, H. Takada, The copolymer of methyl methacrylate and methacrylic acid as a sensitive resist for deep-etch X-ray lithography Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 2, pp. 46- 49 ,(1996) , 10.1007/BF02447749
J. Mohr, Requirements on resist layers in deep-etch synchrotron radiation lithography Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 6, pp. 2264- 2267 ,(1988) , 10.1116/1.584067
T. Haga, H. Okuyama, H. Takada, Development of microconnector with an automatic connecting/disconnecting mechanism Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 6, pp. 157- 160 ,(2000) , 10.1007/S005420050187
D. Münchmeyer, J. Langen, Manufacture of three-dimensional microdevices using synchrotron radiation (invited) Review of Scientific Instruments. ,vol. 63, pp. 713- 721 ,(1992) , 10.1063/1.1142644
W. Ehrfeld, D. Münchmeyer, Three-dimensional microfabrication using synchrotron radiation Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment. ,vol. 303, pp. 523- 531 ,(1991) , 10.1016/0168-9002(91)90289-3
H. Okuyama, Y. Hirata, H. Takada, Microfabrication of thick tungsten films for use as absorbers of deep X-ray lithography masks Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 7, pp. 80- 84 ,(2001) , 10.1007/S005420100091
Hiroshi Takada, Yoshihiro Hirata, Hiroshi Okuyama, Toshiyuki Numazawa, Development of LIGA process using a superconducting compact synchrotron light source Electrical Engineering in Japan. ,vol. 120, pp. 40- 48 ,(1997) , 10.1002/(SICI)1520-6416(19970715)120:1<40::AID-EEJ6>3.0.CO;2-P