Effect of frequency on microplasmas driven by microwave excitation

摘要: The effect of excitation frequency on the breakdown voltage a microwave (mw) microdischarge and its steady-state plasma parameters is studied by self-consistent one-dimensional Particle-in-Cell Monte Carlo collisions model. It found that for microdischarges in which electron wall losses are significant, an increase mw results decrease voltage. For conditions become negligible, does not influence significantly At same time, both regimes, density. analysis have shown dominant heating mechanism Joule while stochastic negligible. Also, it energy distribution function consists two groups, namely, slow fast electrons. presence electrons bulk indicates non-local nature excited microdischarges.