Dinuclear Rh(II) pyrazolates as CVD precursors for rhodium thin films
作者： W. Jeffrey McCarty , Xiaoping Yang , Lauren J. DePue Anderson , Richard A. Jones
DOI: 10.1039/C1DT11649E
关键词:
摘要: New dinuclear rhodium(II) pyrazolate (Pz) complexes of formula Rh2(3-R,5-R′Pz)4·2L (R = R′ CF3, L H2O (1), CH3CN (2)) and Rh2(3-R,5-R′Pz)4 tBu (3); R (4)) have been synthesized from the interaction lithium salt corresponding pyrazole with Rh2(OAc)4 in diethyl ether. The were characterized by X-ray crystallography spectroscopic methods. They further evaluated as precursors for chemical vapor deposition (CVD) Rh thin films using H2 carrier gas. resulting scanning electron microscopy (SEM), diffraction (XRD) photoelectron spectroscopy (XPS).
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