Towards chip scale components for optical coherence tomography
作者： Frederic Nabki , Michael Menard , Jonathan Briere , Mohannad Elsayed , Mohamed Rahim
DOI: 10.1109/ICECS.2016.7841134
关键词:
摘要: Recent work to create components for the miniaturization of optical coherence tomography (OCT) systems is presented. The proposed approach relies on micro-fabrication microelectromechanical (MEMS) electrostatic actuators with integrated onto same die. This can enable very compact and cost effective that have potential reducing form-factor OCT systems. In this paper, progress two subsystems presented: a continuously-variable delay line wavelength-swept filter. These are suitable implement time-domain or frequency-domain OCT, respectively. rapidly tunable based laterally rotating MEMS micro-mirror, while swept filter micro-motor.
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