Laser photonic nanojets triggered thermoplasmonic micro/nanofabrication of polymer materials for enhanced resolution.
作者： Yahya Elkarkri , Xiaolai Li , Binglin Zeng , Zhaoxin Lian , Ji Zhou
关键词:
摘要: Micro/nanofabrication of polymer materials is interest for micro/nanofluidic systems. Due to the optical diffraction limit, it remains a challenge achieve nanoscale resolution fabrication using an ordinary continuous-wave laser system. In this study, we therefore propose photonic nanojet-based micro/nanofabrication method low-power and low-cost laser. The nanojets were produced glass microspheres. Moreover, thermoplasmonic effect was employed by depositing gold layer beneath films. By applying nanojet triggered thermoplasmonics, sub-micrometer surface structures, as well their arrays, fabricated with power threshold value down 10 mW. influences microsphere diameters, thicknesses layers films on microstructures systematically investigated, which aligns finite-difference time-domain simulation results.
sci-hub.st 参考文章(51)
Zhuang Zhi Chong, Say Hwa Tan, Alfonso M. Gañán-Calvo, Shu Beng Tor, Ngiap Hiang Loh, Nam-Trung Nguyen, Active droplet generation in microfluidics Lab on a Chip. ,vol. 16, pp. 35- 58 ,(2016) , 10.1039/C5LC01012H
Hui Yang, Martin A.M. Gijs, Optical microscopy using a glass microsphere for metrology of sub-wavelength nanostructures Microelectronic Engineering. ,vol. 143, pp. 86- 90 ,(2015) , 10.1016/J.MEE.2015.03.072
Holger Becker, Laurie E Locascio, Polymer microfluidic devices Talanta. ,vol. 56, pp. 267- 287 ,(2002) , 10.1016/S0039-9140(01)00594-X
Canet Acikgoz, Mark A. Hempenius, Jurriaan Huskens, G. Julius Vancso, Polymers in conventional and alternative lithography for the fabrication of nanostructures European Polymer Journal. ,vol. 47, pp. 2033- 2052 ,(2011) , 10.1016/J.EURPOLYMJ.2011.07.025
Arash Darafsheh, Nicholaos I. Limberopoulos, John S. Derov, Dennis E. Walker, Vasily N. Astratov, Advantages of microsphere-assisted super-resolution imaging technique over solid immersion lens and confocal microscopies Applied Physics Letters. ,vol. 104, pp. 061117- ,(2014) , 10.1063/1.4864760
Yang Liao, Ya Cheng, Changning Liu, Jiangxin Song, Fei He, Yinglong Shen, Danping Chen, Zhizhan Xu, Zhichao Fan, Xunbin Wei, Koji Sugioka, Katsumi Midorikawa, Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration Lab on a Chip. ,vol. 13, pp. 1626- 1631 ,(2013) , 10.1039/C3LC41171K
Soon-Cheol Kong, Alan Sahakian, Allen Taflove, Vadim Backman, Photonic nanojet-enabled optical data storage. Optics Express. ,vol. 16, pp. 13713- 13719 ,(2008) , 10.1364/OE.16.013713
C.R.K. Marrian, E.S. Snow, Proximal probe lithography and surface modification Microelectronic Engineering. ,vol. 32, pp. 173- 189 ,(1996) , 10.1016/0167-9317(96)00005-6
Ramazan Sahin, Ergun Simsek, Selcuk Akturk, Nanometer-Scale Structuring of Gold Thin-Films and Graphene by Femtosecond Laser Bessel Beams conference on lasers and electro optics. ,(2014) , 10.1364/CLEO_SI.2014.STU1E.3
Yuliang Wang, Huimin Wang, Shusheng Bi, Real time drift measurement for colloidal probe atomic force microscope: a visual sensing approach AIP Advances. ,vol. 4, pp. 057130- ,(2014) , 10.1063/1.4880242