Tribological Behavior of DLC Coatings at Various Humidities
作者： Gyeong-Man Jo , Hyo-Seok An , Dae-Eun Kim
DOI: 10.3795/KSME-A.2002.26.9.1842
关键词:
摘要: Although DLC coatings have good tribological properties, these are dependant on the deposition method, property of contact surface, and test condition. Humidity, which has little influence behavior in macro scale, is an important factor small devices like MEMS. The objective this study to investigate with particular attention their wettability at various humidities. were deposited Si substrates tested using a reciprocating friction tester against SiNballs results showed that was relative humidity wettablility coatings. Friction coefficient high higher thar low humidity. tungsten-containing had wear resistance whereas derived from argon(Ar)+cesium(Cs) gases
koreascience.or.kr参考文章(16)
M Neuhaeuser, H Hilgers, P Joeris, R White, J Windeln, Raman spectroscopy measurements of DC-magnetron sputtered carbon nitride (a-C:N) thin films for magnetic hard disk coatings Diamond and Related Materials. ,vol. 9, pp. 1500- 1505 ,(2000) , 10.1016/S0925-9635(00)00276-4
Huiwen Liu, Akihiro Tanaka, Tai Kumagai, Influence of sliding mating materials on the tribological behavior of diamond-like carbon films Thin Solid Films. ,vol. 352, pp. 145- 150 ,(1999) , 10.1016/S0040-6090(99)00283-7
H. Liu, A. Tanaka, K. Umeda, The tribological characteristics of diamond-like carbon films at elevated temperatures Thin Solid Films. ,vol. 346, pp. 162- 168 ,(1999) , 10.1016/S0040-6090(98)01093-1
H Ronkainen, S Varjus, J Koskinen, K Holmberg, Differentiating the tribological performance of hydrogenated and hydrogen-free DLC coatings Wear. ,vol. 249, pp. 260- 266 ,(2001) , 10.1016/S0043-1648(01)00558-0
W.-J Wu, T.-M Pai, M.-H Hon, Wear behavior of silicon-containing diamond-like carbon coatings Diamond and Related Materials. ,vol. 7, pp. 1478- 1484 ,(1998) , 10.1016/S0925-9635(98)00213-1
M.P Delplancke-Ogletree, O.R Monteiro, Wear behavior of diamond-like carbon/metal carbide multilayers Surface & Coatings Technology. ,vol. 108, pp. 484- 488 ,(1998) , 10.1016/S0257-8972(98)00572-6
A.A. Voevodin, A.W. Phelps, J.S. Zabinski, M.S. Donley, Friction induced phase transformation of pulsed laser deposited diamond-like carbon Diamond and Related Materials. ,vol. 5, pp. 1264- 1269 ,(1996) , 10.1016/0925-9635(96)00538-9
Y. Liu, A. Erdemir, E.I. Meletis, A study of the wear mechanism of diamond-like carbon films Surface & Coatings Technology. ,vol. 82, pp. 48- 56 ,(1996) , 10.1016/0257-8972(95)02623-1
Jun Fu Zhao, Zhi Hui Liu, James McLaughlin, The wear effect on microstructure of DLC films PECVD-deposited on Al2O3:TiC substrates a confocal micro-Raman study Thin Solid Films. ,vol. 357, pp. 159- 165 ,(1999) , 10.1016/S0040-6090(99)00656-2
Yılmaz Özmen, Akihiro Tanaka, Touru Sumiya, The effect of humidity on the tribological behavior of diamond-like carbon (DLC) film coated on WC-Co by physical vapor deposition method Surface & Coatings Technology. ,vol. 133, pp. 455- 459 ,(2000) , 10.1016/S0257-8972(00)00929-4