A comprehensive study of stability in an electro-statically actuated micro-beam

摘要: Abstract This paper studies the mechanical and bifurcation behavior of a capacitive micro-beam suspended between two conductive stationary plates, which can be used as micro-switch or RF resonator. The equation dynamic motion is obtained using Euler–Bernoulli beam theorem. equilibrium positions fixed points are by solving static deflection step-by-step linearization method (SSLM) discretizing Galerkin weighted residual method. In order to study global stability modified non-linear mass–spring model used. Non-linear trajectories in phase portraits given regions bounded unbounded solutions separated homoclinic heteroclinic orbits plates illustrated. Critical values applied voltage leading qualitative changes through saddle node pitch fork bifurcations for different gap ratios obtained. effects gaps also investigated.