作者: Salvatore Pignataro
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摘要: The physico-chemical processes occurring in the particle (ion, photon) bombardment of a surface are reviewed, with particular emphasis on ion beam–solid interaction. main factors influencing chemical reactions which occur by will be discussed terms Lindhard–Scharff–Schiott (LSS) theory basis experimental data obtained both organic and inorganic simple systems as well polymers. Some typical reaction schemes reporte modification physical properties bombarded shown to connected nature products formed consequence energy deposition beam. A few examples showing importance above phenomena field interface analysis given.