摘要: A monolithic RMS-DC converter for measuring wideband RMS signals is presented. Two identical thermoelements thermal conversion are formed using planar diaphragm structures and micromachined dielectric windows. Each thermoelement consists of two polysilicon heaters a thin-film temperature sensor located on window operated at constant on-chip control feedback circuitry. The achieve efficiency greater than 7 degrees C/mW with time less 5 ms. circuitry realized standard 3- mu m p-well CMOS process minor modifications compatibility the formation. This measures over full scale range 1 V RMS, handles crest factors in excess five, exhibits typical nonlinearity 1%, achieves 3-dB bandwidth 20 MHz. >
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sci-hub.se 参考文章(4)
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