Tunable Resonant Cavity Enhanced Detectors using Vertical MEMS Mirrors
作者： Niels Quack , Stefan Blunier , Jurg Dual , Martin Arnold , Ferdinand Felder
DOI: 10.1109/OMEMS.2007.4373892
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摘要: Highly sensitive photodetectors for the mid infrared have been obtained by placing a photodiode inside Fabry Perot cavity. These resonant cavity enhanced detectors (RCED) are at resonances only, which depend on distance between two mirrors of Displacing one these allows changing length and thus selecting detection wavelength. The design, simulation fabrication MEMS mirror its integration with counter grown molecular beam epitaxy presented. First results external moved piezoactuation described, too.
sci-hub.se 参考文章(3)
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Martin Arnold, Dmitry Zimin, Hans Zogg, Resonant-cavity-enhanced photodetectors for the mid-infrared Applied Physics Letters. ,vol. 87, pp. 141103- ,(2005) , 10.1063/1.2061855
Niels Quack, Ivan Zust, Stefan Blunier, Jurg Dual, Martin Arnold, Ferdinand Felder, Mohamed Rahim, Hans Zogg, Electrostatically actuated micromirror for resonant cavity enhanced detectors international conference on micro electro mechanical systems. pp. 711- 714 ,(2007) , 10.1109/MEMSYS.2007.4432997