Spoke transitions in HiPIMS discharges
作者： A Hecimovic , V Schulz-von der Gathen , M Böke , A von Keudell , J Winter
DOI: 10.1088/0963-0252/24/4/045005
关键词:
摘要: Spokes, localised light emission patterns appearing during the HiPIMS discharge, are investigated using optical diagnostic and electrical probes. Both, temporal spatial aspects of spoke phenomenon have been investigated. The evolution from stochastic to self-organised consisting a finite number spokes along racetrack (= mode number), transition between two modes, stability is presented. For constant discharge current, steadily rotate above magnetron racetrack. modes described by model which links decrease with increasing current. It based on interaction current in spoke, Ar rarefaction replenishment times that prevail over electrostatic repulsion charged particle diffusion. Two merge an acceleration trailing respect direction rotation.
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