Molecular fluorine (F2) laser with narrow spectral linewidth

摘要: A molecular fluorine (F 2 ) laser is provided wherein the gas mixture comprises for generating a spectral emission including two or three closely spaced lines around 157 nm. An etalon provides line selection such that output beam only includes one of these lines. The may also serve to outcouple and/or narrow selected line. Alternatively, prism and narrows be resonator reflector which selects line, while another element outcouples beam. plates, preferably uncoated, comprise material transparent at nm, as CaF , MgF LiF BaF SrF quartz doped quartz. plates are separated by spacers comprising having low thermal expansion constant, invar, zerodur®, ultra glass, helium solid does not absorb radiation nm fills gap between evacuated. further neon buffer gas. Another used narrowing. One more highly reflective mirror, high finesse with back surface reflector. Any etalons, prism, brewster plate partially mirror seal discharge chamber.