Capacitor constructions comprising perovskite-type dielectric materials and having different degrees of crystallinity within the perovskite-type dielectric materials
作者： Cem Basceri
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摘要: The invention includes a capacitor construction. A electrode has perovskite-type dielectric material thereover. an edge region proximate the electrode, and portion further from than region. different amount of crystallinity also method forming is provided, chemical vapor deposited over first electrode. depositing flowing at least one metal organic precursor into reaction chamber component precursor. exposed to oxidizing conditions during formation so that more amorphous character second material.
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