Vapor growth device

摘要: PROBLEM TO BE SOLVED: To form a film with uniform thickness free from contamination foreign matter by locating susceptor mounted substrate on the upper surface of quartz hood housing heater inside to effect longer service life heater. SOLUTION: The lower gas head base 3 part reaction oven 10 is 2, while manifold 4 having conducting channels 5a, 5b communicating 5a", 5b" and 5a', 5b', respectively. chamber 11 detachably equipped cramping means 13, houses 14, thermal insulating material 15 reflector 16 are placed 14. virtual center 12 18 made up an 18a outside 18b.