Nanocrystalline polymorphic oxide perovskite-based high-κ low-leakage thin film materials
作者： Iryna S. Golovina , Matthias Falmbigl , Aleksandr V. Plokhikh , Andrew L. Bennett-Jackson , Anthony J. Ruffino
DOI: 10.1016/J.TSF.2020.138123
关键词:
摘要: We report on thin-film nanocrystalline polymorphic BaTiO 3 for enabling high dielectric and low leakage response. BaTiO 3-Al 2 O 3 bi-layer thin films based on nanocrystalline BaTiO 3 …
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