On the optimization of the laser ablation process for the deposition of YBa2Cu3O7−δ thin films
作者： M.G. Norton , C.B. Carter
DOI: 10.1016/0921-4534(90)90641-Q
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摘要: Abstract Pulsed-laser ablation is widely used to produce thin films of the YBa2Cu3O7−δ superconductor. The technique consists a number variables which would be expected influence film growth, it therefore important understand what effect changing these parameters will have, in order optimize growth process. Variation some laser has been shown affect morphology deposited during early stages growth. For example, rate was found microstructure film. At high growth-rates (∼ 1.5 nm/s), mixture c-axis and a- or b-axis oriented grains were formed, while at lower (
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