SUBSTRATE TEMPERATURE EFFECT ON THE VISIBLE AND NEAR-INFRARED REFRACTIVE INDEX AND ROUGHNESS OF THIN FILMS OF TANTALUM NITRIDE
作者： Hugo A Torres-Muro , Arturo Talledo-Coronado , Roberto Machorro-Mejia , Jose Ordonez-Miranda , Manuel E Guevara-Vera
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摘要: TORRES-MURO, Hugo A. et al. SUBSTRATE TEMPERATURE EFFECT ON THE VISIBLE AND NEAR-INFRARED REFRACTIVE INDEX AND ROUGHNESS OF THIN FILMS OF TANTALUM NITRIDE. Momento [online]. 2020, n. 61, pp. 37-61. ISSN 0121-4470. https://doi. org/10.15446/mo. n61. 86003.
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