ZnO-based transparent conductive thin films via sonicated-assisted sol-gel technique

摘要: We report on the growth of Al-doped ZnO (AZO) thin films onto Corning 7740 glass substrates via sonicatedassisted sol-gel technique. The influence of Al dopant on crystallisation behavior, optical and electrical properties of AZO films has been systematically investigated. All films are polycrystalline with a hexagonal wurtzite structure with a preferential orientation according to the direction< 002>. All films exhibit a transmittance above than 80-90% along the visible range up to 800 nm and a sharp absorption onset below 400 nm corresponding to the fundamental absorption edge of ZnO.