作者： Nikhil Apte , Amin Nikoozadeh , Butrus T Khuri-Yakub , Kwan Kyu Park
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摘要: We present CMUTs with vented cavities for improving their bandwidth for airborne applications. The CMUTs are modeled using finite element analysis with the fluid losses described using the Navier-Stokes equations. We fabricated CMUTs vented through the plate as well as through the substrate. We demonstrate a wide range of bandwidth and sensitivity for these CMUTs by varying the squeeze film effect.