Room-Temperature Au/TiO2Nanorods/Ti TFT Butanone Sensor: Role of Surface States

摘要: A one-dimensional TiO2 nanorod-based thin film transistor (TFT) for butanone sensing is presented here. A low-cost hydrothermal process was used to deposit TiO2 nanorods on a Si/SiO2 substrate. X-ray diffraction, field-emission scanning electron microscopy (FESEM), photoluminescence spectroscopy, and Raman spectroscopy were used to examine the structural, morphological, and optical features of the nanostructure. Formation of aligned nanorods as the carrier transport channels in FET structure were confirmed through FESEM. Electrical characterization revealed the threshold voltage (VT), mobility (µ), transconductance (gm), Ion/Ioff ratio, and sub-threshold swing (SS) as 0.77 V, 12.2 cm2/V-s, 5.37 mS, 0.6 × 104, and 64.63 mV/dec, respectively. Sensor study exhibited an increase in the drain current (Id) and shifts in the threshold voltage (VT) upon exposure to different concentrations of butanone with …