Research on High Performance TMR-Superconducting Composite Magnetic Sensor and Performance Optimization

摘要: The tunneling magnetoresistance (TMR)-superconducting composite magnetic sensor, characterized by its high sensitivity, compact size, and low power consumption, exhibits significant potential for applications in weak magnetic field detection. Magnetic field resolution is a pivotal parameter in assessing the performance of the TMR-superconducting composite sensor in detecting weak magnetic fields. This study optimized the bonding process, leading to the successful fabrication of a TMR-superconducting composite sensor with an enhanced magnetic field resolution of 5.23pT/√Hz@1Hz. Expanding on this achievement, several strategies were employed to further enhance the sensor's magnetic field resolution, such as transitioning from bonding to coating techniques, implementing a constriction- folded structure for the superconducting loop, and refining the TMR film layer.