Fabrication of micromechanical structures with a new electrodeless electrochemical etch stop

C.M.A. Ashruf , F.J. French , H.M. Sarro , M. Nagao
Sensors 1 703 -706

3
1997
Characterization of a bulk-micromachined post-process module: for silicon RF technology

K.T. Ng , N.P. Pham , L.P.M. Sarro , B. Rejaei
topical meeting on silicon monolithic integrated circuits in rf systems 99 -102

12
2000
Micro-CAT with redundant electrodes (CATER)

F.D van den Berg , C.W.E van Eijk , R.W Hollander , P.M Sarro
Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment 453 ( 3) 530 -535

1
2000
All ALD TiO 2 -Al 2 O 3 -TiO 2 horizontal slot waveguides for optical sensing

A. Purniawan , P.J. French , G. Pandraud , Y. Huang
ieee sensors 1954 -1957

2
2011
PECVD SiC photonic crystal sensor

G. Pandraud , Y. Huang , P.M Sarro , F. Bernal Arango
ieee sensors 367 -370

2011
Two-dimensional microgap gas chambers on silicon

J van der Marel , A van den Bogaard , C.W.E van Eijk , R.W Hollander
Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment 367 ( 1) 181 -184

14
1995
X-ray spectroscopy with a multi-anode sawtooth silicon drift detector: the diffusion process

J Šonský , R.W Hollander , P.M Sarro , C.W.E van Eijk
Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment 477 ( 1) 93 -98

5
2002
A LaF3 : Nd(10%) scintillation detector with microgap gas chamber read-out for the detection of γ-rays

J van der Marel , V.R Bom , C.W.E van Eijk , R.W Hollander
Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment 392 310 -314

14
1997
Design and characteristics of MicroGap Counters on silicon

F.D.van den Berg , J.van der Marel , C.W.E.van Eijk , R.W Hollander
Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment 409 ( 1) 90 -94

7
1998
A microgap photomultiplier for the read-out of a LaF3:Nd(10%) scintillator

J.van der Marel , V.R Bom , C.W.E.van Eijk , R.W Hollander
Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment 410 ( 2) 229 -237

5
1998
Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers

A Berthold , L Nicola , P.M Sarro , M.J Vellekoop
Sensors and Actuators A-physical 82 ( 1) 224 -228

163
2000
Silicon three-axial tactile sensor

Z Chu , P.M Sarro , S Middelhoek
Sensors and Actuators A: Physical 54 ( 1-3) 505 -510

129
1996
Optimization of a low-stress silicon nitride process for surface-micromachining applications

P.J French , P.M Sarro , R Mallée , E.J.M Fakkeldij
Sensors and Actuators A-physical 58 ( 2) 149 -157

234
1997
Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions

P.M Sarro , D Brida , W.v.d Vlist , S Brida
Sensors and Actuators A: Physical 85 ( 1-3) 340 -345

71
2000
Scintillation light read-out by thin photodiodes in silicon wells

C.P Allier , R.W Hollander , P.M Sarro , C.W.E van Eijk
Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment 442 255 -258

7
2000
Relative humidity sensors using porous SiC membranes and Al electrodes

E.J Connolly , H.T.M Pham , J Groeneweg , P.M Sarro
Sensors and Actuators B-chemical 100 ( 1) 216 -220

58
2004
Reflectance-based Photonic Crystal Liquid Sensors Made of ALD TiO2

Y. Huang , G. Pandraud , P.M Sarro
Procedia Engineering 25 1389 -1392

2
2011
PEDOT:PSS: a Conductive and Flexible Polymer for Sensor Integration in Organ-on-Chip Platforms

W.F Quirós-Solano , N Gaio , C Silvestri , G Pandraud
30th Eurosensors Conference, EUROSENSORS 2016

36
2016
Full wafer transfer-free graphene

Pasqualina Maria Sarro , Filiberto Ricciardella , Sten Vollebregt

2019