Effective Schottky Barrier lowering for contact resistivity reduction using silicides as diffusion sources

Zhen Zhang , F. Pagette , C. D'Emic , B. Yang
symposium on vlsi technology 154 -155

4
2010
Plasma nitridation of thin Si layers for GaAs dielectrics

Z. Wang , D. M. Diatezua , D-G. Park , Z. Chen
Journal of Vacuum Science & Technology B 17 ( 5) 2034 -2039

7
1999
Gate length scaling and high drive currents enabled for high performance SOI technology using high-κ/metal gate

K. Henson , H. Bu , M. H. Na , Y. Liang
international electron devices meeting 1 -4

19
2008
Metal‐insulator‐semiconductor structures on p‐type GaAs with low interface state density

Zhi Chen , Dae‐Gyu Park , Francke Stengal , S. Noor Mohammad
Applied Physics Letters 69 ( 2) 230 -232

34
1996
CHARACTERISTICS OF SI3N4/SI/N-GAAS METAL-INSULATOR-SEMICONDUCTOR INTERFACES GROWN ON GAAS(111)B SUBSTRATE

Dae‐Gyu Park , Deda M. Diatezua , Zhi Chen , S. Noor Mohammad
Applied Physics Letters 69 ( 20) 3025 -3027

8
1996
Thermal Stability of Sputter‐Deposited TiSi2 Films with Crystal Orientation

Dae‐Gyu Park , You‐Seok Suh , Sang‐Hyeob Lee , Sam‐Dong Kim
Electrochemical and Solid State Letters 2 ( 12) 642 -644

6
1999
Abnormal oxidation of TiSi2 film in patterned TiSi2/Polysilicon gate stack

S‐Aug Jang , Tae‐Kyun Kim , Jun‐Mo Yang , Tae‐Su Park
Electrochemical and Solid-State Letters 3 ( 11) 511 -511

2000
Suppressed Boron Penetration in p^+ poly-Si/Al_2O_3/Si Metal-Oxide-Semiconductor System by Remote Plasma Nitridation of Al_2O_3 Surface

Heung-Jae CHO , Dae-Gyu PARK , Kwan-Yong LIM , Jung-Kyu KO
Extended abstracts of the... Conference on Solid State Devices and Materials 2001 504 -505

2
2001
TaO_xN_y Gate Dielectric with Improved Thermal Stability

CHO Heung-Jae , PARK Dae-Gyu , YEO In-Seok , ROH Jae-Sung
Extended abstracts of the... Conference on Solid State Devices and Materials 2000 238 -239

2000
Method of creating deep trench capacitor using A P+ metal electrode

Dae-Gyu Park , Jack A. Mandelman , Ramachandra Divakaruni

20
2005
finFETs and methods of making same

Dae-Gyu Park , Xinhui Wang , Thomas Safron Kanarsky , Zhibin Ren

82
2011
Characteristics of Sputtered Ta films by Statistical Method

Cheol-Mo Jeong , Dae-Gyu Park , Seung-Jin Lee , Yu-Seok Seo
Korean Journal of Materials Research 11 ( 6) 492 -497

2001
38
2006
Fin field effect transistor including a strained epitaxial semiconductor shell

Dae-Gyu Park , Young-Hee Kim , Kevin K. Chan , Masaharu Kobayashi

8
2016
Shallow extension junction

Effendi Leobandung , Pouya Hashemi , Dae-Gyu Park , Min Yang

4
2016
FDSOI radiation dosimeters

Jeng-Bang Yau , Michael S. Gordon , Kenneth P. Rodbell , Steven J. Koester
international symposium on vlsi technology systems and applications 1 -2

7
2011