Laser diodes map surface flatness of complex parts
L. Deck , R. Smythe , P. De Groot
Laser Focus World 30 ( 2) 95 -98
2
1994
Profiling complex surface structures using scanning interferometry
Peter J De Groot , Robert Stoner , Xavier Colonna De Lega
185
2007
Interferometric optical systems having simultaneously scanned optical path length and focus
Peter J De Groot , Xavier Colonna De Lega , Senthil Balasubramaniam
121
2006
Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
Peter J De Groot
113
2006
Scanning interferometry for thin film thickness and surface measurements
Peter J De Groot , Xavier Colonna De Lega
104
2008
Profiling complex surface structures using scanning interferometry
Peter J De Groot , Robert Stoner , Xavier Colonna De Lega
90
2006
Chirped synthetic wavelength laser radar
Peter J De Groot , John A McGarvey
86
1994
Triangulation methods and systems for profiling surfaces through a thin film coating
Peter J De Groot , Xavier Colonna De Lega
83
2007
Measurement of complex surface shapes using a spherical wavefront
Peter J De Groot , Xavier Colonna De Lega
72
2004
Low coherence grazing incidence interferometry for profiling and tilt sensing
Xavier Colonna De Lega , Peter J De Groot , Michael Kuchel
71
2007
Surface profiling using an interference pattern matching template
Peter J De Groot
65
2007
Interferometers utilizing polarization preserving optical systems
Henry Allen Hill , Peter J De Groot
63
2001
Transparent film profiling and analysis by interference microscopy
Peter J De Groot , Xavier Colonna de Lega , Martin F Fay
Interferometry XIV: Applications 7064 158 -163
59
2008
Methods and systems for interferometric analysis of surfaces and related applications
Peter J De Groot
59
2007
52
2001
Profiling complex surface structures using height scanning interferometry
Peter J De Groot , Robert Stoner , Xavier Colonna De Lega
45
2007
Scanning interferometry
Xavier Colonna De Lega , David A Grigg , Peter J De Groot
45
2006
Laser diode interferometer
Peter J De Groot , Gregg M Gallatin , George Gardopee
44
1992
43
2006
Interferometer having a coupled cavity geometry for use with an extended source
Xavier Colonna De Lega , Peter J De Groot
41
2006