Low coherence grazing incidence interferometry for profiling and tilt sensing

摘要: (60) Provisional application No. 60/539,437,? led on Jan.(57) ABSTRACT26, 2004, rovisional a lication No. 60/502,907,...? led on Se}; 15 2003 glrjovisional application NO ‘Anopt1cal system mcludes aphotollthography system, aloW60/502 930? led’on Set’, 15 2003 provisional app1i_ coherence interferometer, and a detector. The photolithog Cation’No’60/502 932? led on S’ep 15 2003 prO_ raphy system is con? gured to illuminate a portion of an Visional a licatiol’l NO’60/502 933? led’on Se’15 object With a light pattern and has a reference surface. The2003 pp'’’ p'’ loW coherence interferometer has a reference optical path' and a measurement optical path. Light that passes along the (51) Int_ CL reference optical path re? ects at least once from the refer G01B 9/02(200601) ence surface and light that passes along the measurement (52) Us Cl 356/497 optical path re? ects at least once from the object. The 58 F,‘I …