Steven Shannon
机构: North Carolina State University, Department of Nuclear Engineering
主页: ncsu.edu
每年引用次数
引用次数
引用: 3,250
H-指数: 31
I10-指数 : 61
出版物: 269
P2-53 Uniformity Improvement by Controlling Boundary Conditions in a Very High Frequency, Capacitively Coupled Etcher
MC Kutney , DJ Hoffman , ML Miller , SC Shannon
PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON DRY PROCESS 263 -263
Substrate cleaning chamber and the cleaning and adjustment method
Parkhe V.D. Mehta V. , Brown K. , Pipitone J.A. , Hoffman D.J.
2016
Plasma confinement baffle and flow equalizer for enhanced magnetic control of plasma radial distribution
Nguyen A. Miller M.L. , Hoffman D.J. , Shannon S.C. , Kutney M.
2014
Substrate cleaning chamber, cleaning and conditioning method
Parkhe V.D. Mehta V. , Brown K. , Pipitone J.A. , Hoffman D.J.
2014
Ceiling electrode for cleaning chamber and the cleaning chamber
Parkhe V.D. Mehta V. , Brown K. , Pipitone J.A. , Hoffman D.J.
2014
Multi-frequency capacitively-coupled plasma source with uniformity control employing plural VHF sources
Sun J.Y. Collins K.S. , Ramaswamy K. , Buchberger D.A. , Rauf S.
2013
Matching network characterization using variable impedance analysis
Dinev J. Shannon S. , Hoffman D. , Lane S. , Merry W.
2014
Geometry considerations for EEDF measurements using Langmuir probes
Elijah Martin , Steven Shannon , Ahmed El Saghir
Bulletin of the American Physical Society
2010
Hairpin resonator probes with frequency domain boxcar operation for time resolved density measurements in pulsed RF discharges
David Coumou , Steven Shannon , Theresa Kummerer , David Peterson
Bulletin of the American Physical Society
2014
Study of a capacitive discharge driven by three frequencies using inline RF metrology
Steven Shannon , Daniel Hoffman , Jang Gyoo Yang , Valery Godyak
Bulletin of the American Physical Society
2005
IEDF Skew Control Using Phase Locked Dual Frequency RF Drive
David Coumou , Steven Shannon , Theresa Kummerer , Hamilton Clark
Bulletin of the American Physical Society
2013
Physical and chemical interactions at the interface between atmospheric pressure plasmas and aqueous solutions
Detlef Knappe , Alexander Lindsay , Brandon Byrns , Steven Shannon
Bulletin of the American Physical Society
2014
Fundamental Studies of Pulsed Processing Plasmas
Mark Kushner , Steven Shannon , Vincent Donnelly , Tianyu Ma
Bulletin of the American Physical Society
2017
Selective Etching by Tailored RF Ion Energy Control Using Frequency/Phase Locked RF Power Delivery
David Coumou , Steven Shannon , Sergey Voronin , Alok Ranjan
Bulletin of the American Physical Society
2017
Successes, Failures, and Lessons Learned Navigating Industry Supported Research in Academia
Steven Shannon
Bulletin of the American Physical Society
2017
Multi-Physics Object Oriented Simulation Environment (MOOSE)
Davide Curreli , Cody Permann , Casey Icenhour , Alex Lindsay
Bulletin of the American Physical Society
1
2018
Complex Transients in Power Modulated Inductively Coupled Chlorine Plasmas
Steven Shannon , Vincent M Donnelly , Tianyu Ma , Tyler List
Bulletin of the American Physical Society
2018
Validation Studies using ELK and the Open Source MOOSE Framework Application Zapdos for Electromagnetic Coupled Plasma Simulation
Casey Icenhour , Alexander Lindsay , Steven Shannon , David Green
Bulletin of the American Physical Society
2019
Ion particle and energy flux uniformity control using a phase locked dual ICP coil design
David Coumou , Steven Shannon
APS Annual Gaseous Electronics Meeting Abstracts
2015