引用次数
引用: 597
H-指数: 15
I10-指数 : 19
出版物: 23
DSA template mask determination and cut redistribution for advanced 1D gridded design
Zigang Xiao , Yuelin Du , Martin DF Wong , Hongbo Zhang
Photomask Technology 2013 8880 155 -162
40
2013
Hybrid lithography for triple patterning decomposition and e-beam lithography
Haitong Tian , Hongbo Zhang , Zigang Xiao , Martin DF Wong
Optical Microlithography XXVII 9052 188 -194
13
2014
Design automation algorithms for advanced lithography
Zigang Xiao
University of Illinois at Urbana-Champaign
2015