Yuji Awano , Akio Kawabata , Daiyu Kondo , Shintaro Sato
Akio Kawabata , Shintaro Sato
Yuji Awano , Shintaro Sato , Noriyoshi Shimizu
Tsugio Kumai , Shintaro Sato , Kenichi Itoh , Koji Matsumoto
Takashi Hyakushima , Yuji Awano , Akio Kawabata , Tomo Murakami
Sensors and Materials 21 ( 7) 373 -383
Yuji Awano , Akio Kawabata , Taisuke Iwai , Daiyu Kondo
2005 Proceedings - 10th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2005 527 -534
David Y.H. Pui , Shintaro Sato , James H. Vincent , S. P. Gomes
Proceedings of the 1997 ASME Fluids Engineering Division Summer Meeting, FEDSM'97. Part 24 (of 24)
Shintaro Sato
international workshop on active matrix flatpanel displays and devices
Mari Ohfuchi , Shintaro Sato
Journal of Applied Physics 129 ( 6) 064305
Koji Tsunoda , Hironori Nishino , Shintaro Sato , Hiroyasu Yamashita
Journal of Applied Physics 129 ( 17) 173101
Mizuhisa Nihei , Akio Kawabata , Shintaro Sato , Tatsuhiro Nozue
international conference on solid-state and integrated circuits technology 541 -543
Shintaro Sato , Da-Ren Chen , David Y. H. Pui
Aerosol Science and Technology 36 ( 2) 145 -153
Shintaro Sato , Da-Ren Chen , David Y. H. Pui
Aerosol Science and Technology 37 ( 10) 770 -779
Masatada Yuri , Noriaki Kandaka , Toshiyuki Kambe , Shintaro Sato
Journal of the Physical Society of Japan 61 ( 5) 1829 -1830
Masatada Yuri , Shintaro Sato , Yoshihiro Aiura , Akio Yamada
Journal of the Physical Society of Japan 61 ( 7) 2557 -2568
Mizuhisa Nihei , Akio Kawabata , Motonobu Sato , Tatsuhiro Nozue
InTech
Manabu Ohtomo , Hideyuki Jippo , Hironobu Hayashi , Junichi Yamaguchi
ACS Applied Materials & Interfaces 10 ( 37) 31623 -31630
Junichi Yamaguchi , Hironobu Hayashi , Hideyuki Jippo , Akitoshi Shiotari
Communications Materials 1 ( 1) 36
Shintaro Sato
symposium on vlsi technology
Daiyu Kondo , Katsunori Yagi , Motonobu Sato , Mizuhisa Nihei
Chemical Physics Letters 514 294 -300