A novel method for producing spatially uniform aerosols in a low pressure environment

摘要: Aerosols flowing in a tube under vacuum conditions, e.g., semiconductor processing equipment, are often found to have nonuniform profile due low Reynolds number flow (Bae et al. 1998). A novel method produce spatially uniform aerosols at pressure has been developed. The employs counter-flow injection configuration. Two identical critical orifices of 200 w m diameter installed opposite each other an aerosol mixing chamber. opposing jets from the two result turbulent and streams. 0.3 or less diameter, as 1 Torr, shown be distributed uniformly over cross section with inner 3.48 cm. This further improved provide lower pressures by using reducer downstream arrangement provides 0.2 Torr.