Intercalated multi-layer graphene interconnects with low resistivity

Daiyu Kondo , Haruhisa Nakano , Bo Zhou , Kenjiro Hayashi
IEICE Technical Report; IEICE Tech. Rep. 114 ( 469)

Dependence of field effect mobility of CVD graphene on its grain size

Katsunori Yagi , Ayaka Yamada , Kenjiro Hayashi , Naoki Harada

Efficient CVD Graphene Transfer Techniques by using Oxide Passivations

Junichi Yamaguchi , Kenjiro Hayashi , Shintaro Sato , Naoki Yokoyama

Annealing Condition Optimization of Sputtered Amorphous Carbon for Large-grain, Multi-layer Graphene

Motonobu Sato , Haruhisa Nakano , Makoto Takahashi , Takayuki Muro

Proc. Int. Interconnect Technol. Conf., 2003 Proc. Int. Interconnect Technol. Conf., 2003, 2003

Mizuhisa Nihei , Akiko Kawabata , Daiyu Kondo , Masahiro Horibe

Proc. Int. Interconnect Technol. Conf., 2004 Proc. Int. Interconnect Technol. Conf., 2004, 2004

Mizuhisa Nihei , Akiko Kawabata , Daiyu Kondo , Masahiro Horibe

IEDM Tech. Dig., 2009 IEDM Tech. Dig., 2009 237, 2009

Daiyu Kondo , Shintaro Sato , Katsunori Yagi , Naoki Harada

Electrical properties of carbon nanotubes grown at a low temperature by radical chemical vapor deposition for future LSI interconnects

YOKOYAMA Daisuke , ISHIMARU Kentaro , IWASAKI Takayuki , SATO Shintaro
Extended abstracts of the... Conference on Solid State Devices and Materials 2007 56 -57

2007