Ziqing Duan
机构: Subject matter expert (coatings) at Apple
每年引用次数
引用次数
引用: 1,349
H-指数: 20
I10-指数 : 30
出版物: 71
SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material
Milind Gadre , Shaunak Mukherjee , Deenesh Padhi , DUAN Ziqing
5
2021
Gas flow profile modulated control of overlay in plasma CVD films
Prashant Kumar Kulshreshtha , Sudha Rathi , Saptarshi Basu , Kwangduk Douglas Lee
11
2016
Gas flow profile modulated control of overlay in plasma CVD films
Prashant Kumar Kulshreshtha , Sudha Rathi , Saptarshi Basu , Kwangduk Douglas Lee
6
2019
Gas flow profile modulated control of overlay in plasma CVD films
Prashant Kumar Kulshreshtha , Sudha Rathi , Saptarshi Basu , Kwangduk Douglas Lee
2017
Edge hump reduction faceplate by plasma modulation
Sungwon Ha , Kwangduk Douglas Lee , Ganesh Balasubramanian , Juan Carlos Rocha-Alvarez
13
2018
Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application
Rui Cheng , DUAN Ziqing , Milind Gadre , Abhijit Basu Mallick
2019
Methods of forming self-aligned vias
David Thompson , Benjamin Schmiege , Jeffrey W Anthis , Abhijit Basu Mallick
65
2018
Method and apparatus for clamping and declamping substrates using electrostatic chucks
Zheng John Ye , Hiroji Hanawa , Juan Carlos Rocha-Alvarez , Pramit Manna
33
2017
Ultra-high modulus and etch selectivity boron-carbon hardmask films
Prashant Kumar Kulshreshtha , DUAN Ziqing , Karthik Thimmavajjula Narasimha , Kwangduk Douglas Lee
29
2019
Methods of forming self-aligned vias and air gaps
Susmit Singha Roy , DUAN Ziqing , Abhijit Basu Mallick , Praburam Gopalraja
25
2019
Deposition and treatment of films for patterning
Atashi Basu , Abhijit Basu Mallick , DUAN Ziqing , Srinivas Gandikota
22
2019
Methods for gapfill in high aspect ratio structures
Pramit Manna , Ludovic Godet , Rui Cheng , Erica Chen
15
2019
Geometric control of bottom-up pillars for patterning applications
DUAN Ziqing , Abhijit Basu Mallick
9
2019
Uniform wafer temperature achievement in unsymmetric chamber environment
Sungwon Ha , Paul Connors , Jianhua Zhou , Juan Carlos Rocha-Alvarez
7
2017
Methods for wordline separation in 3D-NAND devices
Yihong Chen , DUAN Ziqing , Abhijit Basu Mallick , Kelvin Chan
4
2021
Methods of forming self-aligned vias and air gaps
Susmit Singha Roy , DUAN Ziqing , Abhijit Basu Mallick , Praburam Gopalraja
4
2020
Methods for wordline separation in 3D-NAND devices
Yihong Chen , DUAN Ziqing , Abhijit Basu Mallick , Kelvin Chan
4
2020
Seamless tungsten fill by tungsten oxidation-reduction
Yong Wu , Yihong Chen , Shishi Jiang , DUAN Ziqing
4
2020
Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system
DUAN Ziqing , Kwangduk Douglas Lee , Abdul Aziz Khaja , Amit Kumar Bansal
4
2017
Methods of lowering wordline resistance
Yihong Chen , Yong Wu , Chia Cheng Chin , Xinliang Lu
2
2020