Effects of gas velocity on deposition rate and amount of cluster incorporation into a-Si:H films fabricated by SiH4 plasma chemical vapor deposition
Takashi KOJIMA , Susumu TOKO , Kazuma TANAKA , Hyunwoong SEO
Plasma and Fusion Research 13 1406082 -1406082
2
2018
Time evolution of radical deposition rate and cluster amount
Masaharu SHIRATANI , TOKO Susumu , Yoshihiro TORIGOE , KEYA Kimitaka
한국진공학회 학술발표회초록집 37 -37
2016
Methanation of CO₂ by low pressure helicon plasma discharge
TOKO Susumu , Ryu KATAYAMA , KOGA Kazunori , Masaharu SHIRATANI
한국진공학회 학술발표회초록집 1027 -1027
2016
Optical emission spectroscopy of plasma-catalytic CO$_{\mathrm{2}}$ methanation
Masaharu Shiratani , Susumu Toko , Kazunori Koga , Akihisa Yamamoto
Bulletin of the American Physical Society
2019
Optical emission spectroscopy of plasma-catalytic CO 2 methanation
Masaharu Shiratani , Susumu Toko , Kazunori Koga , Akihisa Yamamoto
APS
2019
Electron Microscopy Study of Binary Nanocolloidal Crystals with ico-AB13 Structure Made of Monodisperse Silica Nanoparticles
Yasuhiro Sakamoto , Yoshiyuki Kuroda , Susumu Toko , Takuji Ikeda
Journal of Physical Chemistry C 118 ( 27) 15004 -15010
4
2014
Spatiotemporal optical emission spectroscopy to estimate electron density and temperature of plasmas in solution
Kenichi Inoue , Shion Takahashi , Noritaka Sakakibara , Susumu Toko
Journal of Physics D 53 ( 23) 235202
3
2020
Dependence of CO2 Conversion to CH4 on the CO2 Flow Rate in a Helicon Discharge Plasma
Susumu Toko , Ryu Katayama , Kazunori Koga , Edbertho Leal-Quiros
Science of Advanced Materials 10 ( 5) 655 -659
4
2018
Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability
Susumu Toko , Yoshihiro Torigoe , Weiting Chen , Daisuke Yamashita
Thin Solid Films 587 126 -131
7
2015
Effects of Grid DC Bias on Incorporation of Si Clusters into Amorphous Silicon Thin Films in Multi-Hollow Discharge Plasma CVD
Susumu Toko , Yeonwon Kim , Yuji Hashimoto , Yoshinori Kanemitu
Proceedings of the 12th Asia Pacific Physics Conference (APPC12) 2 015069
2014
Low-Pressure Methanation of CO2 Using a Plasma–Catalyst System
Susumu Toko , Satoshi Tanida , Kazunori Koga , Masaharu Shiratani
Science of Advanced Materials 10 ( 8) 1087 -1090
2018
Optical Bandgap Energy of Si Nanoparticle Composite Films Deposited by a Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method
Susumu Toko , Yoshinori Kanemitsu , Kazunori Koga , Hyunwoong Seo
Journal of Nanoscience and Nanotechnology 16 ( 10) 10753 -10757
1
2016
Hysteresis in volume fraction of clusters incorporated into a-Si:H films deposited by SiH 4 plasma chemical vapor deposition
Susumu Toko , Yoshihiro Torigoe , Kimitaka Keya , Takashi Kojima
Surface and Coatings Technology 326 388 -394
2017
Correlation between SiH2/SiH and light-induced degradation of p-i-n hydrogenated amorphous silicon solar cells
Kimitaka Keya , Takashi Kojima , Yoshihiro Torigoe , Susumu Toko
Japanese Journal of Applied Physics 55
4
2016
Effect of gas flow rate and discharge volume on CO2 methanation with plasma catalysis
Susumu Toko , Masashi Ideguchi , Taiki Hasegawa , Takamasa Okumura
Japanese journal of applied physics 61 ( SI) SI1002
2022
Hydrogen-included plasma-assisted reactive sputtering for conductivity control of ultra-wide bandgap amorphous gallium oxide
Kosuke Takenaka , Hibiki Komatsu , Taichi Sagano , Keisuke Ide
Japanese Journal of Applied Physics 63 ( 4) 04SP65 -04SP65
2024
Growing low-temperature, high-quality silicon-dioxide films by neutral-beam enhanced atomic-layer deposition
Hua-Hsuan Chen , Susumu Toko , Daisuke Ohori , Takuya Ozaki
Journal of Physics D: Applied Physics 53 ( 1) 015204 -015204
2
2019
Morphology of Spin-coated PEDOT: PSS on Neutral Beam etched Silicon nanopillar surface for Hybrid Solar Cells
Aditya Saha , Daisuke Ohori , Susumu Toko , Sou Takeuchi
JSAP Annual Meetings Extended Abstracts The 67th JSAP Spring Meeting 2020 2388 -2388
2020
Effect of Hydrogen Neutral Beam Treatment on Atomic layer deposition SiO2
HuaHsuan Chen , Bei Bei Ge , Susumu Toko , Daisuke Ohori
JSAP Annual Meetings Extended Abstracts The 80th JSAP Autumn Meeting 2019 3038 -3038
2019
Effects of gas flow rate on deposition rate and number of Si clusters incorporated into a-Si: H films
Susumu Toko , Yoshihiro Torigoe , Kimitaka Keya , Hyunwoong Seo
Japanese journal of applied physics 55 ( 1S) 01AA19 -01AA19
10
2015