Heterojunction photovoltaic cell

Thomas Hantschel , Karl Littau , Scott Elrod

96
2006
Nanostructured composite photovoltaic cell

Scott Elrod , Karl Littau , Thomas Hantschel , Raj Apte

40
2006
18
2017
Sputtered spring films with low stress anisotropy

David K Fork , Scott Solberg , Karl Littau

29
2005
Interdigitated finger coextrusion device

David K Fork , Karl Littau

22
2015
Interdigitated electrode device

David K Fork , Karl Littau

18
2017
2
2018
Inherently ferroelectric hf-zr containing films

Vijay Kris Narasimhan , LEHN Jean-Sébastien , Karl Littau , Jacob Woodruff

2023
Multi-zone resistive heater

Steven Aihua Chen , Henry Ho , Michael X Yang , Bruce W Peuse

398
2002
Vapor based site-isolated processing systems and methods

Bernardo Donoso , Karl Littau , Lawrence D Bartholomew

254
2019
251
1998
Chemical vapor deposition chamber

Ashok Sinha , Mei Chang , Ilya Perlov , Karl Littau

85
1997
Construction of a film on a semiconductor wafer

Chyi Chern , Michal Danek , Marvin Liao , Roderick C Mosely

84
2002
Multi-zone resistive heater

Steven Aihua Chen , Henry Ho , Michael X Yang , Bruce W Peuse

43
2003
Method of forming a silicon nitride layer on a substrate

Michael X Yang , Chien-Teh Kao , Karl Littau , Steven A Chen

38
2003
Method of forming a silicon nitride layer on a semiconductor wafer

Michael Yang , Chien-Teh Kao , Karl Littau , Steven Chen

31
2002
18
2009
Methods and apparatus for minimizing excess aluminum accumulation in CVD chambers

Karl Littau , Dashun S Zhou , Alfred Mak , Ling Chen

17
1999