RF MEMs variable capacitors for tunable filters

Charles L. Goldsmith , Andrew Malczewski , Zhimin J. Yao , Shea Chen
International Journal of Rf and Microwave Computer-aided Engineering 9 ( 4) 362 -374

126
1999
RF MEMS devices: a brave new world for RF technology

John Ehmke , Jim Brank , Andrew Malczewski , Brandon Pillans
2000 IEEE Emerging Technologies Symposium on Broadband, Wireless Internet Access. Digest of Papers (Cat. No. 00EX414) 4 pp. -4 pp.

13
2000
Emerging Digital Micromirror Device Based Systems and Applications XI

Michael R Douglass , John Ehmke , Benjamin L Lee
Proc. of SPIE Vol 10932 1093201 -1

2019
MEMS electrostatic actuator device for RF varactor applications

Arun Gupta , William C McDonald , Adam Fruehling , Ivan Kmecko

6
2018
Method and apparatus for switching high frequency signals

John C Ehmke , Charles L Goldsmith , Zhimin J Yao , Susan M Eshelman

122
2004
Method and apparatus for switching high frequency signals

John C Ehmke , Charles L Goldsmith , Zhimin J Yao , Susan M Eshelman

99
2002
Water level interconnection

James L Cheever , Charles L Goldsmith , John C Ehmke , Billy D Ables

94
2003
Wafer level interconnection

James L Cheever , Charles L Goldsmith , John C Ehmke , Billy D Ables

93
2003
Membrane for micro-electro-mechanical switch, and methods of making and using it

Shea Chen , Brandon W Pillans , John C Ehmke , Zhimin Jamie Yao

48
2004
Method for fabricating a lid for a wafer level packaged optical MEMS device

John C Ehmke , Vincent C Lopes , John Paul Harris

43
2005
Substrate supported three-dimensional micro-coil

Charles L Goldsmith , Andrew Malczewski , John C Ehmke , Zhimin Yao

15
2000
Method and apparatus for increasing bandwidth of a stripline to slotline transition

II James McGlathery Irion , R Thomas Dover , Richard E Hodges , Allan R Logan

10
2002
Hermetically-sealed mems device and its fabrication

John C Ehmke , Virgil C Ararao , Toby R Linder , Lance W Barron

8
2015
Method and apparatus for packaging circuit devices

Billy D Ables , John C Ehmke , Roland W Gooch

8
2011
Structure and method for bonded wafer barrier

John C Ehmke , Jennifer Lynne Holm

2024
Automated overlay removal during wafer singulation

Andrew Nelson , John C Ehmke , Daryl R Koehl , BAYS Nathan

2023