RF MEMs variable capacitors for tunable filters
作者： Charles L. Goldsmith , Andrew Malczewski , Zhimin J. Yao , Shea Chen , John Ehmke
DOI: 10.1002/(SICI)1099-047X(199907)9:4<362::AID-MMCE7>3.0.CO;2-H
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摘要: () ABSTRACT: An RF MEMs microelectromechanical system variable capacitor has been demonstrated with a 22:1 tuning range, from 1.5 to 33.2 pF of capacitance. This was constructed using bistable membrane capacitors individual ranges 70:1 100:1, control voltages in the 30-55 V switching speeds less than 10 mS, and operating frequencies as high 40 GHz. These devices may eventually provide viable alternative electronic varactors improved range lower loss. Q 1999 John Wiley & Sons, Inc. Int J Microwave CAE 9: 362)374, 1999.
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