Quasi-Analog Multi-Step Tuning of Laterally-Moving Capacitive Elements Integrated in 3D MEMS Transmission Lines

摘要: This paper reports on multi-position RF MEMS digitally tuneable capacitor concept resulting in quasi-analog tuning with large range. The capacitors are integrated inside a coplanar transmission line whose is achieved by moving the sidewalls of 3D micromachined line, actuators being completely embedded and shielded ground layer. Devices symmetrical two three-stage have been fabricated an SOI process. A range Cmax/Cmin=2.41 total 7 discrete steps from 44 to 106 fF was for capacitors. actuator designs different mechanical stiffness, actuation voltages 16 73 V, were evaluated. Therobustness high-power signals has investigated nonlinear electromechanical model, which shows that self occurs high-stiffness (73 N/m) not below 50 dBm, even very low-stiffness devices (9.5 do self-actuate 40 dBm.