MEMS designed for tunable capacitors
作者： H.D. Wu , K.F. Harsh , R.S. Irwin , Wenge Zhang , A.R. Mickelson
DOI: 10.1109/MWSYM.1998.689339
关键词:
摘要: A new tunable capacitor based on a standard microelectromechanical systems (MEMS) technology has been demonstrated. Its unique feature was the use of thermal actuators as indirect drives to change air gap from 2 0.2 /spl mu/m for high-Q MM-wave capacitors. Such drive scheme achieved sub-/spl controllability. The insertion loss polysilicon MEMS measured be -4dB at 40 GHz. would have better than -1 dB if were coated with metal.
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