Characterization of sol-gel derived PZT and PLZT thin films
作者： R. Kurchania , S.J. Milne
关键词: Dielectric 、 Titanate 、 Analytical chemistry 、 Lanthanum 、 Lead zirconate titanate 、 Ferroelectricity 、 Sol-gel 、 Materials science 、 Thin film 、 Spin coating
摘要: Lead zirconate titanate (PZT) and lead lanthanum (PLZT) precursor sols were prepared using a diol based sol-gel route. Thin films deposited by spin coating onto PtrTi/SiO/sub 2//Si substrates. The effects of incorporating up to 10 mol% the base PZT 53/47 composition, firing temperature (500-700/spl deg/C) on crystallization, microstructure, ferroelectric dielectric properties have been investigated. Films fired at 700/spl deg/C for 15 minutes with 0, 2 5 mole percent levels had values remanent polarization 31, 23 14 /spl mu/C cm/sup -2/ (at 300 kV -1/, 60 Hz) corresponding relative permittivity 1485, 830 700 respectively.
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