Effects of dopants in PZT films

作者: Jhing-Fang Chang , Seshu B. Desua

DOI: 10.1557/JMR.1994.0955

关键词:

摘要: Undoped and lanthanide (La Nd) doped Pb(ZrxTi1-x)03, i.e., PZT, ferroelectric thin films were prepared by metallorganic decomposition (MOD) spin-coating. The precursors for making the undoped PZT derived from lead acetate, zirconium n-propoxide, titanium isopropoxide. In addition, lanthanum acetylacetonate neodymium acetate introduced into precursor solution to accomplish doping of corresponding elements. Both coated onto Pt/Ti/Si02/Si single-crystal sapphire substrates various thicknesses annealed at a range temperatures times. effects dopants in studied with regard microstructure, Curie temperatures, crystal distortion, optical properties, electrical properties. results indicate that addition La Nd tends enhance perovskite phase formation improve packing densities properties films.

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