Chemical modifications of Pb(Zr0.3,Ti0.7)O3 precursor solutions and their influence on the morphological and electrical properties of the resulting thin films
作者： Theodor Schneller , Rainer Waser
DOI: 10.1007/S10971-007-0764-2
关键词: Lead zirconate titanate 、 Ferroelectricity 、 Thin film 、 Phase (matter) 、 Spin coating 、 Materials science 、 Titanium 、 Mineralogy 、 Texture (crystalline) 、 Transition metal 、 Chemical engineering
摘要: Tetragonal lead zirconate titanate thin films on platinized silicon wafers have been prepared from chemically different precursor solutions by chemical solution deposition. Literature known routes evaluated and an optimized standard process has developed leading to Pb(Zr0.3,Ti0.7)O3 with a high degree of (111) orientation which consequently shows square hysteris loops Pr values 34 μC/cm2. Other solvents, alkoxides the transition metals, carboxylates systematically introduced in this their influence final morphological electrical properties studied. It found that use (II) propionate titanium tetra n-butoxide for synthesis leads decrease remanent polarization ∼50%. Furthermore reaction atmosphere after spinning during pyrolysis investigated. Increased ambient humidity spin coating also caused significant deterioration film properties. The findings explained terms hindered formation texture promoting intermediate Pt x Pb phase.
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